半导体工厂特气泄漏的一种快速检测方法
吴龙海 （ 连云港太瓦新能源有限公司 ）
张 琳 （ 连云港太瓦新能源有限公司 ）
吴志强 （ 连云港太瓦新能源有限公司 ）
钟金枝 （ 连云港太瓦新能源有限公司 ）
陈 杨 （ 连云港太瓦新能源有限公司 ）
https://doi.org/10.37155/2717-5316-0602-40Abstract
在大规模半导体制造工厂，特气泄漏的快速检测具有至关重要的意义。本研究提出一种基于露点变化的 检测方法，用于监测环境中亲水性强的特气泄漏。该方法利用特气泄漏时对周围微观环境湿度的影响，结合微气象学 原理和现代传感技术，实现了对特气泄漏的实时监测和定位。本研究为特气泄漏的监测提供了一种新思路和方法，对 于提高工业安全水平具有积极的理论和实践价值。[1]
Keywords
特气泄漏检测；露点；亲水性；传感器技术Full Text
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Techniques in Environmental Monitoring." Journal of
Environmental Management, vol. 92, no. 4, pp. S123-S129,
2011.
[2] Zhang, H., Li, X., & Wang, F. "Study on the
Relationship between Relative Humidity and Gas Leakage
in Industrial Areas." Safety Science, vol. 108, pp. 125-132,
2017.
[3] Liu, B., Zhou, Y., & Cheng, S. "Detection and
Localization of Gas Leaks Using Wireless Sensor Networks:
A Survey." IEEE Sensors Journal, vol. 18, no. 10, pp. 4370-
4382, 2018.
[4] Patel, M. K., & Sankar, G. "Advances in Gas Sensor
Technology for Environmental Monitoring." Sensors, vol. 19,
no. 5, article 1294, 2019.
Copyright © 2024 吴龙海,张 琳,吴志强,钟金枝,陈 杨
Publishing time:2025-01-31
This work is licensed under a Creative Commons Attribution 4.0 International License
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