A Review of Mechanical Characterization Techniques for Ultrathin Films Beyond Two-Dimensional Materials
Yunfeng Yan （ State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China. ）
Jiayi He （ Shien-Ming Wu School of Intelligent Engineering, South China University of Technology, Guangzhou 510641, China. ）
Wenqi Ji （ Emergency Management College, Nanjing University of Information Science & Technology, Nanjing 210044, China. ）
Zhuorui Hu （ School of Microelectronics, South China University of Technology, Guangzhou 510641, China. ）
Jiaying Xiao （ School of Material Science and Engineering, South China University of Technology, Guangzhou 510641, China. ）
Changlin Li （ School of Material Science and Engineering, South China University of Technology, Guangzhou 510641, China. ）
Hongxi He （ School of Material Science and Engineering, South China University of Technology, Guangzhou 510641, China. ）
Ximing Wang （ School of Electronic and Information Engineering, Nanjing University of Information Science & Technology, Nanjing 210044, China. ）
Jiawen Xu （ Key Laboratory for Liquid-Solid Structural Evolution and Processing of Materials (Ministry of Education), Shandong University, Jinan 250061, China. ）
Yuxuan Gong （ School of Mechanical and Power Engineering, Jiangsu University Jingjiang College, Zhenjiang 212028, China. ）
Nanlong Sun （ School of Agricultural Engineering, Jiangsu University, Zhenjiang 212013, China. ）
https://doi.org/10.37155/2717-526X-0601-5Abstract
Thin films, thinner than the diameter of a human hair (~90µm and below), hold considerable promise across various applications such as flexible electronics, thin film devices, and biomedical applications due to their distinct characteristics. At this juncture, the mechanical properties of these films play a pivotal role as they underpin the stability of these applications. However, evaluating the mechanical properties of these thin films poses a significant technical challenge owing to their minimal thickness, where conventional technologies often prove inadequate. Over the past decade, notable advancements have been made in characterization techniques to surmount this challenge, particularly for ultra-thin films. This review focuses on recently developed experimental techniques used for characterizing the mechanical properties of thin films thinner than the diameter of a human hair, but beyond two-dimensional materials. We introduce these experimental testing techniques, analyze their pros and cons, and discuss their main applications. The mechanical properties of ultrathin films beyond 2D materials discussed in this study include elastic modulus, hardness, in-plane strength, and fracture toughness. We conclude this review article with our perspective on the applications and future research directions of thin films in the current state of the field.
Keywords
Thin film; Mechanical property; Nanomechanics; Mechanical characterizationFull Text
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Publishing time:2024-02-26
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